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Fax +49 (0) 89/4202 4206 www. ... 2.1.3 Miniature Positioning Stage MS 38 with free aperture. 8. 2.2 Linear ...... and switches or something equivalent at one PC.
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Micropositioners

Positionsensors

Motor Controllers

Customized Items

Index

Table of contents of the delivery program Page 1. 1.1

Manual positioners with fine pitch screw Miniature Positioning Stage HS 30

2.

Linear positioning systems with piezo inertial drives

2.1

Linear positioners for one dimension (open design)

2

2.1.1 Miniature Positioning Stage MS 15 2.1.2 Miniature Positioning Stage MS 30 2.1.3 Miniature Positioning Stage MS 38 with free aperture 2.2

Linear positioners for one dimension (closed design)

2.2.1 Miniature Positioning Stage DS 30 2.2.2 Miniature Positioning Stage DS 40 2.2.3 Positioning Stage ML 17 for ultra low temperatures (4 K) 2.3

16 18

Linear positioners for the Nova-System

2.4.1 Miniature Positioning Stage NDS 40 (open loop operation) 2.4.2 Miniature Positioning Stage NDS 70 (closed loop operation)

mechOnics ag

10 12 14

Linear positioners for three dimensions

2.3.1 Miniature Positioners MX 25 and MX 35 2.3.2 Miniature Monomode Coupler MK 25 2.4

4 6 8

20 22

3.

Tilting systems with piezo inertial drives

3.1

Mirror tilting stage MT 25

4.

Position sensors for piezo inertial drives

4.1

Position Sensor PS 30 for Miniature Positioning Stage MS 30

5.

Motor Controllers

5.1 5.1.1 5.1.2 5.1.3 5.1.4

Controllers for piezo inertial drives Handheld controller CN 30 for piezo inertial drives USB – Controller CU 30 for piezo inertial drives USB – Controller CF 30 for piezo inertial drives USB – CAN – Controllers of the Nova Series

28 29 30 31

5.2

Connecting cables for linear positioning systems

35

5.3

Autonomous controller CD 85 for DC-Motors

36

5.4

Autonomous controller CS 85 for stepper motors

38

6.

Customized Items

6.1

Linear Positioning Stage MS 30 with linear measuring system and vacuum preparation

40

6.2

Motorized aperture for REM

40

6.3

XYZ – Positioner for ultra low temperature microscope (4 K)

40

6.4

Fiber Positioner with MX 25

40

Unnützstr. 2B

81825 Munich

24

Fon +49 (0) 89/4202 4207

Fax +49 (0) 89/4202 4206

26

www.mechOnics.de

Micropositioners

Positionsensors

Motor Controllers

Customized Items

Index

Series HS

HS 30

Miniature Translation Stages with fine pitch screws Technical Data

Specifications ¾ ¾ ¾ ¾ ¾ ¾ ¾ ¾ ¾ ¾

compatible with MS 30 series deformation-resistant aluminium, black anodized mountable on slides (OWIS and LINOS) setting sensitivity better than 1 µm self-locking compact design xy or xyz combinations precision ball bearing guides vacuum preparation optionally customized designs possible

Travel: Spindle pitch: Graduation of scale: Setting sensitivity: Mass:

8, 18 or 30 mm 0.25 mm 10 µm 2 µm 35, 41 or 50 g

Load characteristics Max. load capacity Mx, My, Mz Fx, Fy, Fz

1.5 Nm 50 N

Guidance accuracy (without load) For 8 mm travel: Yaw angle < 20 arc sec Pitch angle < 60 arc sec Vertical deviation < 1 µm Lateral deviation < 2 µm

Miniature Translation Stage HS 30

HS.030.0

Application Examples ¾ ¾ ¾ ¾ ¾ ¾

Micro-/Nano Technology Bio Technology Microscopy Quality Control Metrology R&D

mechOnics ag

Unnützstr. 2B

Part no.

Travel

Vacuum

81825 Munich

Fon +49 (0) 89/4202 4207

08

18

30

8 mm

18 mm

30 mm

0

6

9

no

10-6

10-9

Fax +49 (0)89/4202 4206

www.mechOnics.de

Micropositioners

Positionsensors

Motor Controllers

Customized Items

Index

Series HS HS 30, 8 mm travel

HS 30, 18 and 30 mm travel Travel

A

B

C

D

18

40

33.2

10.5

15.5

30

52

45.2

16.5

21.5

mechOnics ag

Unnützstr. 2B

81825 Munich

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Micropositioners

Positionsensors

Motor Controllers

Customized Items

Index

Series MS

MS 15

Ultra small Miniature Translation Stages with piezo electric inertial drive Technical Data Travel: Max. speed:

Specifications             

Piezo driven step motor with low hysteresis holds reached position without current step width about 15 nm (depends on controller) positioning accuracy better than 50 nm velocity up to 1.5 mm/s (depends on controller) travel 3.5 mm xy or xyz combinations CNC-machined aluminium body precision ball bearing guides no limit switches necessary vacuum preparation optionally customized designs possible driven by hand-held (CN.030.0001) or USB controller (CU.030.xx0x) or USB controller (CF.030.xx0x) connection cable CK.030.1003 recommended



Mass:

3.5 mm 1.5 mm/s (depends on controller) 6g

Load characteristics Max. load Mx, My, Mz Fx (blocking force) F y, F z

0.4 Nm 3 (4) N 20 N

Resolution (calculated) Single step ~ 450 nm 1/16-step ~ 30 nm (with controller CU 30) 1/64-step ~ 10 nm (with controller CF 30) Half step Double step (with controller CN 30)

~ 250 nm ~ 900 nm

Guidance accuracy (without load) Yaw angle < 20 arc sec Pitch angle < 60 arc sec Vertical deviation < 1 µm Lateral deviation < 2 µm

Miniature Translation Stage MS 15

Part no.

MS.015.04

Application Examples      

Vacuum

Micro-/Nano Technology Bio Technology Microscopy Quality Control Metrology R&D

mechOnics ag

Unnützstr. 2B

Mounting

81825 Munich

Fon +49 (0) 89/4202 4207

0

6

no

10

0

2

x

-6

xy (not removable)

Fax +49 (0)89/4202 4206

9 10-9

3 xyz

www.mechOnics.de

Micropositioners

Positionsensors

Motor Controllers

Customized Items

Index

Series MS

1,5

7,0

15,0

7,5

1,5

13,5

8 x M1

7,5

1,5

13,5

8 x M1

15,0

MS 15, 3.5 mm travel

1,5

7,5

7,5

13,5

13,5

15,0

Dimensions for xy – combination (not removable)

Dimensions for xyz – combination (xy – combination not removable)

mechOnics ag

Unnützstr. 2B

81825 Munich

Fon +49 (0) 89/4202 4207

Fax +49 (0)89/4202 4206

www.mechOnics.de

Micropositioners

Positionsensors

Motor Controllers

Customized Items

Index

Series MS

MS 30

Miniature Translation Stages with piezo electric inertial drive Technical Data Travel: Max. speed:

Specifications              

Piezo driven step motor with low hysteresis holds reached position without current step width about 10 nm (depends on controller) positioning accuracy better than 50 nm velocity up to 1.2 mm/s (depends on controller) travels up to 60 mm possible open- or closed loop-application xy or xyz combinations CNC-machined aluminium body precision ball bearing guides no limit switches necessary vacuum preparation optionally customized designs possible driven by hand-held (CN.030.0001) or USB controller (CU.030.xx0x) or USB controller (CF.030.xx0x)

Mass:

8, 18 or 30 mm 1.2 mm/s (depends on controller) 32, 38 or 54 g

Load characteristics Max. load Mx, My, Mz Fx (blocking force) F y, F z

0.5 Nm 4.5 (5) N 30 N

Resolution (calculated) Single step ~ 450 nm 1/16-step ~ 30 nm (with controller CU 30) 1/64-step ~ 10 nm (with controller CF 30) Half step Double step (with controller CN 30)

~ 250 nm ~ 900 nm

Guidance accuracy (without load) For 8 mm travel: Yaw angle < 20 arc sec Pitch angle < 60 arc sec Vertical deviation < 1 µm Lateral deviation < 2 µm

Miniature Translation Stage MS 30

Part no.

MS.030.

Application Examples      

Travel

Micro-/Nano Technology Bio Technology Microscopy Quality Control Metrology R&D

mechOnics ag

Unnützstr. 2B

Vacuum

08

18

30

8 mm

18 mm

30 mm

0

6

9

no

10-6

10-9

0

1

Measuring- without system

81825 Munich

Fon +49 (0) 89/4202 4207

with (please specify with sensor)

Fax +49 (0)89/4202 4206

www.mechOnics.de

Micropositioners

Positionsensors

Motor Controllers

Customized Items

Index

Series MS

B

4

15.0

H7

2 x Ø 1.5 - 3

2 x M2.5 - 3

MS 30, 8 mm travel

View X / Ansicht X

12

12.5

X 10

Snkg./cntrb. f. M2.5

M2.5 - 7

10

5.75

12.5

D H7

1.75

3

2 x Ø 1.5 - 3

C

H7

H7

2 x Ø 1.5 - 3

7.5

2 x Ø 1.5 - 5

10

30

10

10

MMCXBuchse/ Socket

20

15

Snkg./cntrb. f. M2.5

5,75

2

6

1.4

A

10

2 x M2.5 - 3 / 2 x Ø 5

20

4 x M3 - 3

B

C

D

18

40

33

10

15

30

52

45

16

21

B

10 6

1.4 Snkg./cntrb. f. M2.5

5,75 M2.5 - 7

10

12.5

5.75

3

1.75

D H7

2 x Ø 1.5 - 3

C

H7

10 H7

2 x Ø 1.5 - 3

7.5

2 x Ø 1.5 - 5

20

MMCXBuchse/ Socket

30

10

10

15

Snkg./cntrb. f. M2.5

View X / Ansicht X

X

12.5

12

15.0

2

4

H7

A

2 x M2.5 - 3

Travel

2 x Ø 1.5 - 3

MS 30, 18 and 30 mm travel

A

mechOnics ag

Unnützstr. 2B

81825 Munich

Fon +49 (0) 89/4202 4207

10

2 x M2.5 - 3 / 2 x Ø 5

20

4 x M3 - 3

Fax +49 (0)89/4202 4206

www.mechOnics.de

Micropositioners

Positionsensors

Motor Controllers

Customized Items

Index

Series MS

MS 38

Miniature Translation Stages with free opening dia 10 mm and piezo electric inertial drive Technical Data Travel: Free opening Max. speed:

Specifications ¾ ¾ ¾ ¾ ¾ ¾ ¾ ¾ ¾ ¾ ¾ ¾ ¾ ¾ ¾

Piezo driven step motor with low hysteresis holds reached position without current step width about 10 nm (depends on controller) positioning accuracy better than 50 nm velocity up to 1.2 mm/s (depends on controller) travel up to 8 mm free opening of 10 mm (on whole travel) fits to optical bench systems (LINOS, OWIS aso.) xy or xyz combinations CNC-machined aluminium body precision ball bearing guides no limit switches necessary vacuum preparation optionally customized designs possible driven by hand-held (CN.030.0001) or USB controller (CU.030.xx0x) or USB controller (CF.030.xx0x)

Mass:

8 mm 10 mm 1.5 mm/s (depends on controller) 32 g

Load characteristics Max. load Mx, My, Mz Fx (blocking force) Fy, Fz

0.4 Nm 4.5 (5) N 20 N

Resolution (calculated) Single step ~ 450 nm 1/16-step ~ 30 nm (with controller CU 30) 1/64-step ~ 10 nm (with controller CF 30) Half step Double step (with controller CN 30)

~ 250 nm ~ 900 nm

Guidance accuracy (without load) Yaw angle < 20 arc sec Pitch angle < 60 arc sec Vertical deviation < 1 µm Lateral deviation < 2 µm

Miniature Translation Stage MS 38

Part no. MS.038.080

Application Examples ¾ ¾ ¾ ¾ ¾ ¾

Vacuum

0

6

9

no

10-6

10-9

Micro-/Nano Technology Bio Technology Microscopy Quality Control Metrology R&D

mechOnics ag

Unnützstr. 2B

81825 Munich

Fon +49 (0) 89/4202 4207

Fax +49 (0)89/4202 4206

www.mechOnics.de

Micropositioners

Positionsensors

Motor Controllers

Customized Items

Index

Series MS

MS 38, 8 mm travel 20

View X / Ansicht X

2 x M2.5

3

ø

,0 12

7

M3

MMCXBuchse/ Socket

2 x M2.5, 1 x M3

6

9 14 19 24 29

14 9

10 mm

4 x M2.5

X

38 31 29 24

9 10

24

2 x M1.0

15

10.0 Snkg./cntrb. f. M2.5

1.4

9.5

6

6

2,9

40

Snkg./cntrb. f. M1

8 10

2 x M3 30

Snkg./cntrb. f. M1

2 x M3

32

xy and xyz combinations

mechOnics ag

Unnützstr. 2B

81825 Munich

Fon +49 (0) 89/4202 4207

Fax +49 (0)89/4202 4206

www.mechOnics.de

Micropositioners

Positionsensors

Motor Controllers

Customized Items

Index

Series DS

DS 30

Miniature Translation Stages with piezo electric inertial drive Technical Data Travel: Max. speed:

Specifications             

Piezo driven step motor with low hysteresis holds reached position without current step width about 20 nm (depends on controller) positioning accuracy better than 50 nm velocity up to 1.2 mm/s (depends on controller) only open-loop application xy combinations CNC-machined aluminium body precision ball bearing guides no limit switches necessary vacuum preparation optionally customized designs possible driven by hand-held (CN.030.0001) or USB controller (CU.030.xx0x) or USB controller (CF.030.xx0x)

Mass: Electrical connector:

8 mm 1.2 mm/s (depends on controller) 32 g 2pin MMCX-plug

Load characteristics Max. load Mx, My, Mz Fx (blocking force) Fy , Fz

0.5 Nm 4.5 (5) N 30 N

Resolution (calculated) Single step ~ 450 nm 1/16-step ~ 30 nm (with controller CU 30) 1/64-step ~ 10 nm (with controller CF 30) Half step Double step (with controller CN 30)

~ 250 nm ~ 900 nm

Guidance accuracy (without load) Yaw angle < 20 arc sec Pitch angle < 60 arc sec Vertical deviation < 1 µm Lateral deviation < 2 µm

Miniature Translation Stage DS 30

Part no. DS.030.

0

Application Examples      

08 Micro-/Nano Technology Bio Technology Microscopy Quality Control Metrology R&D

mechOnics ag

Unnützstr. 2B

Travel

8 mm

Vacuum

81825 Munich

Fon +49 (0) 89/4202 4207

0

6

no

10

-6

Fax +49 (0)89/4202 4206

9 10

-9

www.mechOnics.de

Micropositioners

Positionsensors

Motor Controllers

Customized Items

Index

Series DS DS 30, 8 mm travel

Front view:

Top view:

Rear view:

mechOnics ag

Unnützstr. 2B

81825 Munich

Fon +49 (0) 89/4202 4207

Fax +49 (0)89/4202 4206

www.mechOnics.de

Micropositioners

Positionsensors

Motor Controllers

Customized Items

Index

Series DS

DS 40

Miniature Translation Stages with piezo electric inertial drive Technical Data Travel: Max. speed:

Specifications             

Piezo driven step motor with low hysteresis holds reached position without current step width about 20 nm (depends on controller) positioning accuracy better than 50 nm velocity up to 1.2 mm/s (depends on controller) only open-loop application xy combinations CNC-machined aluminium body precision ball bearing guides no limit switches necessary vacuum preparation optionally customized designs possible driven by hand-held (CN.030.0001) or USB controller (CU.030.xx0x) or USB controller (CF.030.xx0x)

Mass: Electrical connector:

11 mm 1.2 mm/s (depends on controller) 50 g 2pin MMCX-plug

Load characteristics Max. load Mx, My, Mz Fx (blocking force) Fy , Fz

0.5 Nm 4.5 (5) N 30 N

Resolution (calculated) Single step ~ 450 nm 1/16-step ~ 30 nm (with controller CU 30) 1/64-step ~ 10 nm (with controller CF 30) Half step Double step (with controller CN 30)

~ 250 nm ~ 900 nm

Guidance accuracy (without load) Yaw angle < 20 arc sec Pitch angle < 60 arc sec Vertical deviation < 1 µm Lateral deviation < 2 µm

Miniature Translation Stage DS 40

Part no. DS.040.

0

11

Application Examples      

Travel

Micro-/Nano Technology Bio Technology Microscopy Quality Control Metrology R&D

mechOnics ag

Unnützstr. 2B

11 mm

Vacuum

81825 Munich

Fon +49 (0) 89/4202 4207

0

6

no

10

-6

Fax +49 (0)89/4202 4206

9 10

-9

www.mechOnics.de

Micropositioners

Positionsensors

Motor Controllers

Customized Items

Index

Series DS DS 40, 11 mm travel Front view:

Top view:

Rear view:

mechOnics ag

Unnützstr. 2B

81825 Munich

Fon +49 (0) 89/4202 4207

Fax +49 (0)89/4202 4206

www.mechOnics.de

Micropositioners

Positionsensors

Motor Controllers

Customized Items

Index

Series ML

ML 17

Miniature Translation Stages for Ultra Low Temperatures with piezo electric inertial drive Technical Data Travel: Max. speed:

Specifications Piezo driven step motor with low hysteresis holds reached position without current for use at ultra low temperatures up to 4 K step width about 200 nm positioning accuracy better than 1 µm velocity up to 1.0 mm/s travels up to 5 mm xy or xyz combinations possible (L-bracket ML.017.9001 for xyz needed) CNC-machined steel body precision linear bearings no limit switches necessary vacuum preparation optionally customized designs possible driven by USB controller (CU.017.0003)

¾ ¾ ¾ ¾ ¾ ¾ ¾ ¾ ¾ ¾ ¾ ¾ ¾ ¾

Load characteristics Max. load Mx My, Mz Fx (blocking force) Fy, Fz

3.0 Ncm 1.5 Ncm 1.0 (1.5) N 1.0 N

Resolution (calculated) Single step with 22 V (at 4.2 K) ~ 200 nm with 42 V (at 4.2 K) ~ 500 nm with 82 V (at 4.2 K) ~ 1 µm (with controller CU 17 LT) Guidance accuracy (without load) For 5 mm travel: Vertical deviation < 2 µm Lateral deviation < 2 µm

Low Temperature Stage ML 17

Application Examples ¾ ¾ ¾ ¾ ¾ ¾ ¾

Electrical connection: Mass:

5 mm 1.0 mm/s (with controller CU 17 LT) 2 solder points 25 g

ML.017.0

Cryo - applications Micro-/Nano Technology Bio Technology Microscopy Quality Control Metrology R&D

Travel

Vacuum

mechOnics ag

Unnützstr. 2B

Part no.

81825 Munich

Fon +49 (0) 89/4202 4207

05

xx

5 mm

customized

6

9

10-6

10-9

Fax +49 (0)89/4202 4206

www.mechOnics.de

Micropositioners

Positionsensors

Motor Controllers

Customized Items

Index

Series ML Dimensions of the ML 17 32 31 24 16 9 1

15

8

17 16 1

10 x M1 - 1.5

4 x M1 - 1.5

6 21 27

xyz – combination of ML 17

mechOnics ag

Unnützstr. 2B

81825 Munich

Fon +49 (0) 89/4202 4207

Fax +49 (0)89/4202 4206

www.mechOnics.de

Micropositioners

Positionsensors

Motor Controllers

Customized Items

Index

Series MX

MX 25/35

Miniature XYZ Positioners with piezo electric inertial drive Technical Data Travel: MX 25 MX 35 Max. speed:

MX 25 with 2 mm travel in xyz-direction

Specifications           

Piezo driven step motor with low hysteresis holds position without power up to 10 mm travel in xyz step width about 10 nm (depends on controller) positioning accuracy better than 50 nm velocity up to 1.2 mm/s (depends on controller) CNC-machined aluminium body no limit switches necessary vacuum preparation optionally customized designs possible driven by hand-held (CN.030.0001) or USB controller (CU.030.0003) or USB controller (CF.030.xx0x)

2 mm in xyz 10 mm in xyz 1.2 mm/s (depends on the controller)

Mass: MX 25 MX 35

46 g 76 g

Load characteristics Type of load Mx, My, Mz Fx, Fy (jamming force) Fz (jamming force)

0.15 Nm <2N <2N

Resolution (calculated) Single step ~ 450 nm 1/16-step ~ 30 nm (with controller CU 30) 1/64-step ~ 10 nm (with controller CF 30) Half step Double step (with controller CN 30)

~ 250 nm ~ 900 nm

Guidance accuracy (without load) Vertical deviation < 2 µm Lateral deviation < 2 µm

Miniature XYZ Positioner

Part no.

MX.0 5.1 2 Type

0

3

MX 25

MX 35

Application Examples 0      

Micro-/Nano Technology Bio Technology Microscopy Quality Control Metrology R&D

mechOnics ag

Unnützstr. 2B

Top plate design

Vacuum

81825 Munich

Fon +49 (0) 89/4202 4207

x

Standard

custom design

0

6

9

no

10-6

10-9

Fax +49 (0) 89/4202 4206

www.mechOnics.de

Micropositioners

Positionsensors

Motor Controllers

Customized Items

Index

Series MX

4

17

1.5 ± 1

Drawings of the MX 25:

8 ±1

12

M1 - 3

10

4.75

6.5 ± 1

35

20

20 M2.3 - 5

15

10.5

25

12

M1-3

3

M2.3 - 5

4pin - inline socket/ 4pol. Steckerleiste

M2.3 - 5

20

4

30.5

5.5 ± 5

Drawings of the MX 35:

4pin - inline socket/ 4pol. Steckerleiste

M1 - 3

4,65 M2.5 - 5

5

12

20

7.5

15

8 ±5

12

35

10.5

M1-3

14.5 ± 5

45

mechOnics ag

Unnützstr. 2B

4.75

81825 Munich

Fon +49 (0) 89/4202 4207

10

M2.5 - 5

Fax +49 (0) 89/4202 4206

www.mechOnics.de

Micropositioners

Positionsensors

Motor Controllers

Customized Items

Index

Series MK

MK 25

Miniature Monomode Coupler MK 25 with piezo electric inertial motor Technical Data Travel: Max. speed:

2 mm in xyz 1.2 mm/s (depends on controller) 20 mm 58 g

Optical height: Mass:

Resolution (calculated) Single step ~ 450 nm 1/16-step ~ 30 nm (with controller CU 30) Half step Double step (with controller CN 30)

Specifications              

Piezo driven step motor with low hysteresis holds reached position without current aspherical lenses with different NA optical height 20 mm 2 mm travel in xyz different fibre couplers step width about 200 nm positioning accuracy better than 100 nm with CU 30 velocity up to 1.2 mm/s CNC-machined aluminium body no limit switches necessary vacuum preparation optionally customized designs possible driven by hand-held (CN.030.0001) or USB controller (CU.030.xx0x)

Lens type Type A: Numerical aperture Clear aperture Focal length

~ 250 nm ~ 900 nm

0.40 3.7 mm 4.60 (670 nm) 4.64 (785 nm)

Type B: Numerical aperture Clear aperture

0.38 2.5 mm

Miniature MonomodeCoupler MK 25

Part no. MK.025.1

0

1

Coupler type FC

Application Examples      

Micro-/Nano Technology Bio Technology Microscopy Telecommunication Metrology R&D

mechOnics ag

Unnützstr. 2B

Vacuum

Numerical aperture

81825 Munich

Fon +49 (0) 89/4202 4207

SMA

0

6

x

no

10-6

customized

A

B

x

0.40

0.38

customized

Fax +49 (0) 89/4202 4206

www.mechOnics.de

Micropositioners

Positionsensors

Motor Controllers

Customized Items

Index

Series MK

Ø4

4pin - inline socket/ 4pol. Steckerleiste

27.5

4.7

mechOnics ag

35

Unnützstr. 2B

4.75

81825 Munich

10

FC / SMA

3

20

10.5

25

20

M2.3 - 5

4

20

Dimensions of the Monomode Coupler MK 25

Fon +49 (0) 89/4202 4207

20

M2.3 - 5

Fax +49 (0) 89/4202 4206

www.mechOnics.de

Micropositioners

Positionsensors

Motor Controllers

Customized Items

Index

Series NDS

NDS 40

Miniature Translation Stages with piezo electric inertial drive for NOVA system Technical Data

Specifications             

Piezo driven step motor with low hysteresis holds reached position without current step width about 20 nm positioning accuracy better than 50 nm velocity up to 1.2 mm/s only open-loop application xy combinations CNC-machined aluminium body precision ball bearing guides no limit switches necessary vacuum preparation optionally customized designs possible driven by NOVA controller (NC.00x.x000)

Travel: Max. speed: Mass: Electrical connector:

11 mm 1.5 mm/s 70 g 8pin SRC-MiniBridge

Load characteristics Max. load Mx, My, Mz Fx (blocking force) Fy , Fz

0.5 Nm 4.5 (5) N 30 N

Resolution (calculated) Single step ~ 450 nm 1/64-step ~ 10 nm Guidance accuracy (without load) Yaw angle < 20 arc sec Pitch angle < 60 arc sec Vertical deviation < 1 µm Lateral deviation < 2 µm

Miniature Translation Stage NDS 40 NOVA

NDS.040.11 0

Application Examples      

Micro-/Nano Technology Bio Technology Microscopy Quality Control Metrology R&D

mechOnics ag

Unnützstr. 2B

Part no.

Vacuum

0

6

no

10

9 -6

10

-9

Remarks: Vacuum application is possible only without electrical circuit. You need the electronic module NDEM 3 as driving unit.

81825 Munich

Fon +49 (0) 89/4202 4207

Fax +49 (0)89/4202 4206

www.mechOnics.de

Micropositioners

Positionsensors

Motor Controllers

Customized Items

Index

Series NDS NDS 40, 11 mm travel Front view:

Top view:

Rear view:

mechOnics ag

Unnützstr. 2B

81825 Munich

Fon +49 (0) 89/4202 4207

Fax +49 (0)89/4202 4206

www.mechOnics.de

Micropositioners

Positionsensors

Motor Controllers

Customized Items

Index

Series NDS

NDS 70

Miniature Translation Stages with piezo electric inertial drive for NOVA system Technical Data

Specifications

Travel: Max. speed: Mass: Electrical connector:

15 mm 1.5 mm/s 120 g 8pin SRC-MiniBridge

Load characteristics Max. load Mx, My, Mz Fx (blocking force) Fy , Fz

0.5 Nm 9 (10) N 30 N

Resolution Standard Premium High End Excellence

1 µm 0.5 µm 0.1 µm 0.05 µm

(other resolutions on request)

            

Piezo driven step motor with low hysteresis holds reached position without current step width about 20 nm positioning accuracy better than 50 nm velocity up to 1.2 mm/s only closed-loop application xy combinations CNC-machined aluminium body precision ball bearing guides no limit switches necessary vacuum preparation optionally customized designs possible driven by NOVA controller (NC.00x.x000)

Scale tape Material Grating period Length of scale mm Reference mark Linear expansion coefficient Accuracy class

Steel 20 µm measuring length + 22 at the center of the scale 23.8 x 10-6 grd-1 ± 1 µm/m

Electrical Data Scanning frequency Output signal Supply voltage Power consumption Cable length Operating temperature Vibration (50 – 2,000 Hz) Shock (11 ms)

max. 400 kHz RS 422 with interpolation 5 V DC +/- 10% 150 mA 1.5 m 0° – 55° C -2 < 200 ms < 400 ms-2

Miniature Translation Stage NDS 70 NOVA

Part no. NDS.070.15

Application Examples      

Vacuum

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Resolution

0

6

no

10

2

3

1 µm

0.5 µm

9

-6

10

5 0.1 µm

-9

6 0.05 µm

Remarks: Vacuum application is possible only without electrical circuit. You need the electronic module NDEM 3 for closed loop application as driving unit.

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Index

Series NDS NDS 70, 15 mm travel Front view:

Top view:

Rear view:

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Index

Series MT

MT 25

Kinematical Mirror Tilting Stage with piezo electric inertial drive Technical Data Angular adjustment:

6 deg (± 3 deg) in two orthogonal axes 25 mrad/s (depends on controller) 11.5 mm (on rod) 12.5 mm (in plate) dia. 12.7 mm (1/2 inch) dia. 9 mm 46 g 100 g

Max. speed: Optical height: Mirror mount: Free opening: Mass: Max mass of mirror:

Resolution (calculated) Single step ~ 14 µrad 1/16 step ~ 1 µrad (with controller CU 30) 1/64-step ~ 0.3 µrad (with controller CF 30)

Specifications     

Piezo driven step motor with low hysteresis holds reached position without current optical height 11.5 mm (on rod) angular adjustment 6 deg (± 3 deg) in two axes for mirror with dia. 12.7 mm (with mirror adapter also for larger mirrors) free opening of 9 mm solid state hinges step width about 0.3 µrad with CF 30 velocity up to 25 mrad/s (> 1 deg/s) also usable as prism stage no limit switches necessary vacuum preparation optionally customized designs possible driven by hand-held (CN.030.0001) or USB controller (CU.030.xx0x) or USB controller (CF.030.xx0x)

        

Half step Double step (with controller CN 30)

~ 7 µrad ~ 28 µrad

Mirror Tilting Stage MT 25

Part no.

MT.025.0

Application Examples      

0

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Mirror adapter

Vacuum

81825 München

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0

1

without

glas substrate

0

6

no

10-6

x customized

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Customized Items

Index

Series MT

Dimensions of the Mirror Tilting Stage MT 25

24

ø1 0

17.5

24

30.5

M4-5

12.7

25 g6

3-

5

5

25

11.5

9

g6

M

M3

12.7

19

2.5

3pin - inline socket/ 3pol. Steckerleiste

13,50

4,75

Coordinates of the two tilting axes

6,75

ca. 9

13,50

MT 25 with beamsplitter cube on optical rail

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Index

for Series MS

PS 30

Linear Measuring System for Miniature Translation Stage MS 30 Technical Data Measuring length Mass

8, 18 or 30 mm about 20 g

Resolution Standard Premium High End Excellence

1 µm 0.5 µm 0.1 µm 0.05 µm

(other resolutions on request) Miniature Translation Stage MS 30, 8 mm travel with PS 30

Spezifications measuring lengths up to 30 mm resolution better than 50 nm open- or closed loop-application xy combinations ultra high vacuum preparation optionally customized designs possible driven by USB-Controller CU 30 (CU.030.xx0x)

¾ ¾ ¾ ¾ ¾ ¾ ¾

Scale tape Material Grating period Length of scale Reference mark Linear expansion coefficient Accuracy class

23.8 x 10-6 grd-1 ± 1 µm/m

Electrical Data Scanning frequency Output signal Supply voltage Power consumption Cable length Operating temperature Vibration (50 – 2,000 Hz) Shock (11 ms)

max. 400 kHz RS 422 with interpolation 5 V DC +/- 10% 150 mA 1.5 m 0° – 55° C < 200 ms-2 < 400 ms-2

Steel 20 µm measuring length + 22 mm at the center of the scale

Linear Measuring System Part no. PS30 for Miniature Stage MS 30 PS.030.

Application Examples ¾ ¾ ¾ ¾ ¾ ¾

Travel

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Vacuum

Resolution

81825 Munich

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08

18

30

8 mm

18 mm

30 mm

0

3

6

9

no

10-3

10-6

10-9

2

3

5

6

1 µm

0.5 µm

0.1 µm

Fax +49 (0) 89/4202 4206

0.05 µm

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Micropositioners

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Index

for Series MS

3.5

Linear Measuring System PS 30 with adapter plate for MS 30

34

5.3

10

20

20

44

15.4

8

16 20

10

4 x Snkg./cntrb. f. M3

20

H7

2 x M2.3 - 3 / 2 x Ø 1.5 - 3 4 x M3 - 3

XYZ-arrangement with MS 30 (8 mm travel) and PS 30 (8 mm travel and 50 nm resolution)

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Motor Controllers

Index

Series CN

CN 30

Controller for Piezo Electric Inertial Motors

Technical Data Power supply:

Operation modes: “Local” with keyboard (current consumption ~ 20 µA) “Remote” with RS 232-Interface (current consumption ~6 mA incl. LED) change switch for both modes on keyboard

Specifications     

4 x round cell LR6 (Alkaline ~ 2000 mAh) and portable power supply in: 100 – 240 V out: 6 VDC with user-plug Ø 5.5/2.1 mm

Special design for piezo driven step motor works with batteries or external power supply operates up to 3 axes customized designs possible USB-interface optionally

Connections:

9pin Sub D-connector (male) 9pin Sub D-connector (female) 2pin Socket (female)

Speed modes:

“Fast” (ca. 0.7 mm/s) “Slow” (“Fast”/2) “Single step”

Step modes:

“Full step” “Half step” (“full step”/2) “Double step” (“full step” x 2)

RS 232-interface to the internal controller Connection: Data rate:

9pin Sub D-connector (male) 19200 Baud

Software for PC - for DOS, Win 95, Win 2000, Win XP and Win NT:

executable software with action buttons (similar to the stand-alone keyboard) - for use with own programs:

Borland Pascal Unit (DOS) DLL for Windows

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370 g incl. batteries

Dimensions:

158 x 96 x 52 mm

Delivery includes: - miniature power supply - 4 x round cell LR6 - RS 232 connecting cable

Application Examples      

Mass:

CN 30 Controller

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Part no. CN.030.0001

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Index

Series CU

CU 30

USB-Controller for Piezo Electric Inertial Drives

Technical Data Power supply:

USB-interface (without sensor) or portable power supply (for CU 30CL) in: 100 – 240 V out: 6 VDC with user-plug

Operation:

via USB-Interface 1.1 (without sensor) via USB-Interface 2.0 (closed loop)

Connections: without sensor

CU 30 without sensor (for three axes)

1 x 9pin Sub D-connector (female) 1 x USB Type B socket (USB 1.1) 3 x 2pin MMCX sockets (female) 3 x 9pin Sub D-connectors (female) 1 x USB Type B socket (USB 2.0)

closed loop Specifications  

Special design for piezo driven inertial motors works with USB-voltage (without sensor) or an additional power supply (closed loop controller) applications without position sensor or closed loop operates up to 3 axes customized designs possible (interfaces or number of axes)

  

Speed modes:

0 to 1000 (0 to ca. 1.2 mm/s) for CU 30 0 to 255 (0 to ca. 1.2 mm/s) for CU 30CL

Software for PC - for DOS, Win 95, Win 2000, Win XP and Win NT:

executable software with action buttons - for use with own programs:

Borland Delphi 7.0 Unit DLL for Windows Wrapper-DLL for LabView etc. Mass:

about 150 g (without sensor) (also closed loop for 1 axis) about 470 g (closed loop for 3 axes)

Dimensions: without sensor closed loop

118 x 86 x 26 mm (L x W x H) 124 x 170 x 55 mm (L x W x H)

Delivery includes: USB connecting cable (CK.030.USB0) power supply (for 3 axes closed loop)

CU 30 closed loop (for three axes)

USB-Controller CU 30

0

Application Examples      

Operation

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without sensor

0 Interface

USB

3 No. of axes 3

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Part no. CU.030. 0

1 closed loop (CL) (with position sensor)

X customized

X customized

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Index

Series CF

CF 30

USB-Controller for Piezo Electric Inertial Drives

Technical Data

Specifications Special design for piezo driven inertial motors Works with USB-voltage only (one axis move at the same time Works with an additional power supply (simultaneous move off three axes possible) Auto detection of the power supply Operates up to 3 axes Plain text ASCII commands for easy integration in your own environment Drivers for many operating systems Every full step has 64 micro steps Special wave forms for smooth movement customized designs possible (interfaces or number of axes)

       

USB-interface (one axis) or portable power supply in: 100 – 240 V out: 6 VDC with user-plug

Interface (host):

Via USB 1.1 Via USB 2.0 (Full speed)

Interface (client): USB to serial converter FT232R from FTDI (www.ftdichip.com)

CF 30 (for three axes)

 

Power supply:

Connections:

Stage: 9pin Sub D-connector (female) PC: USB Type B socket (USB 1.1)

Speed modes:

-32767 to 32767 (0 to about 1.5 mm/s) Sawtooth voltage (0 to 3.1 KHz) Up to 800 commands/s

Software for PC - for

Win XP and Vista (32 bit):

Executable software with GUI - for use with own programs:

Drivers from FTDI: Future Technology Devices International Ltd. Plain text ASCII commands FTDI Drivers for Windows, Linux, Mac OS X, …. Mass:

about 195 g

Dimensions:

118 x 86 x 26 mm (L x W x H)

Delivery includes: USB connecting cable (CK.030.USB0) Power supply (for 3 axes)

USB-Controller CF 30

0

Application Examples      

Operation

Micro-/Nano Technology Bio Technology Microscopy Quality Control Metrology R&D

without sensor

0 Interface

USB

3 No. of axes 3

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Part no. CF.030. 0

X customized

X customized

X customized

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Index

Series Nova

Nova

USB-Controller for Nova Devices

With the new Nova-Series you get a really inNOVAtive new controller system which is developed both for use in university labs and for industrial uses. The NOVA controller gives you the possibility to drive different positioning devices – piezo inertial drives (with or without integrated electronic circuits), dynamic piezo motors, stepper motor drives with integrated electronic circuits and switches or something equivalent at one PC. The system is based on the industrial CAN – Bus which supplies both the needed power and the controlling data to the end devices. These end devices has either to be intelligent (with own electronic circuits) or a special controller device is needed, especially to connect the former piezo inertial drives as MS 30/38, MX 25/35 stages and so on. The NOVA system gives you also the possibility to connect additional controllers via the CAN to CAN controller together. This gives you the advantage to upgrade the number of the end devices which are controlled by one PC to fit your requirements. The following sketch shows the connection possibilities of the NOVA system.

data & power CAN & 42 V (DC)

NOVA-System NOVA-Controller (NC6C) CAN to CAN

electronics module (NDEM 3) electronics module (NDEM 3)

MX 35

MS 38

piezo inertial device (NDS 40)

supply voltage 220 V (AC)

piezo motor devices

USB

PC

NOVA-Controller (NC6U) USB to Can

closed loop positioner (NDS 70) switches (NDED 16), laser ...

supply voltage 220 V (AC)

stepper motor device (NDR 40) NOVA-Controller (NC3) supply voltage 12..24 V (DC)

For this new NOVA System we have developed the first linear positioning devices with piezo inertial drives and integrated electronic circuit. The NDS 40 is an open loop stage with 11 mm in travel and the NDS 70 stage is a closed loop stage with integrated linear measuring system with 15 mm in travel and a resolution of up to 50 nm. The following devices will be developed in the near future: NDR 40 – Rotary stage with stepping motor NDED 16 – switches for optical parts Devices to control lasers and other parts in your optical assembly

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Series Nova

Nova

USB-Controller for Nova Devices

The following sketch shows you the driving possibilities and the stack based server client architecture of the NOVA System.

Client Software - GUI for single devices - GUI for same device types - GUI for bus management

Client DLL

Integration - LabView - VEE - Matlab - Delphi - C/C++,C#

Client DLL

NOVA-Server - independent process - CAN-Stack - interprocess communication

Technical specifications - underlying CAN bus - easy integration (client dll) - mixing code from different programming languages - data and power use the same wire - Client-Server communication (running several applications simultaneously) - use of several NOVA-Controller at the same time (up to 16) - different controller sizes (ports) - maximum 256 devices (one type)

USB NOVA-Controller

USB-Driver

For integration in your software environment we offer a wide range of interfaces as LabView, MatLab, VEE, Delphi and C/C++/C#.

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Index

Series Nova

Nova

USB-Controller for Nova Devices

Technical Data Power supply:

portable power supply in: 100 – 240 V out: 12 - 24 VDC with user-plug or 220 V (AC)

Interface (host):

Via USB 2.0 (Full speed)

Interface (client): USB to CAN bus Connections:

Stages: PC:

RJ 45 (8pin) USB Type B socket (USB 2.0)

Software for PC

Specifications

- for

 CAN-based USB-controller for piezo inertial, stepping motor and dynamical piezo motor devices  Several controllers for different numbers of end devices available  Possibility of easy connection for additional controllers  Drivers for many operating systems

Win XP and Vista (32 bit):

Executable software with GUI - for use with own programs:

LabView, MatLab, VEE, Delphi and C/C++/C# Mass:

about 195 g (3 axes) about 500 g (6 axes)

Dimensions: 3 axes 6 axes

118 x 86 x 26 mm (L x W x H) 124 x 170 x 55 mm (L x W x H)

Delivery includes: USB connecting cable (CK.030.USB0) Power supply (for 3 axes)

NOVA - Controller

Part no. NC.00 . 000

Application Examples      

3 Micro-/Nano Technology Bio Technology Microscopy Quality Control Metrology R&D

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No. axes 3 axes

Interface

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6 6 axes

U

C

USB

CAN

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Micropositioners

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Customized Items

Index

Series Nova Technical Data Power supply: Connections to: controller: stages:

via CAN – Bus from NOVA controller

Erni SRCA (8pin) Erni SRCA(4pin) open loop Erni SRCA(12pin) closed loop

Step modes:

1/ 64 step

Mass:

about 50 g

Dimensions:

72 x 50 x 22 mm (L x W x H)

Specifications  CAN-based controller for piezo inertial devices  Open or closed loop controllers available  Possibility of easy connection of former piezo inertial devices as MS 30/38, MX 25/35 or MT 25

NOVA - Electronic module Part no. microstep ND.EM .0000

Application Examples      

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1 Operation mode

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closed loop (1 axis)

3 open loop (3 axes)

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Index

Connecting cables

CK 25/30

Connecting Cables for Piezo Electric Inertial Drives

Part-no.

Description

Connections

Length

CK.025.0002

connecting cable for 1 x MT 25 (standard)

9pin Sub D-connector (male) to 3pin inline plug

1m

CK.025.0003

connecting cable for 1 x MK 25 or 1 x MX 25/35 (standard)

9pin Sub D-connector (male) to 4pin inline plug

1m

CK.025.1002

connecting cable for 1 x MT 25 (open wires)

9pin Sub D-connector (male) to 3 open wires

1m

CK.025.1003

connecting cable for 1 x MK 25 or 1 x MX 25/35 (open wires)

9pin Sub D-connector (male) to 4 open wires

1m

CK.025.1062

vacuum connecting cable (up to10 mbar) for 1 x MT 25 (open wires)

-6

3pin inline plug to to 3pin inline plug

1m

CK.025.1063

vacuum connecting cable (up to10 mbar) for1 x MK 25 or 1 x MX 25/35 (open wires)

-6

4pin inline plug to 4pin inline plug

1m

CK.025.1092

vacuum connecting cable (up to10 mbar) for 1 x MT 25 (open wires)

-9

3pin inline plug to directly mounting to MT 25

1m

CK.025.1093

vacuum connecting cable (up to10 mbar) for 1 x MK 25 or 1 x MX 25/35 (open wires)

-9

4pin inline plug to directly mounting to MX 25/35

1m

CK.030.0001

connecting cable for 1 x MS 30 (for closed loop controller CU 30 CL)

1 MMCX-plug (angled) to 1 MMCX-plug (angled)

1m

CK.030.0001.3m

connecting cable for 1 x MS 30 (for closed loop controller CU 30 CL)

1 MMCX-plug (angled) to 1 MMCX-plug (angled)

3m

CK.030.0003

connecting cable for up to 3 x MS 30 (standard)

9pin Sub D-connector (male) to 3 MMCX-plugs (angled)

1m

CK.030.0003.2m

connecting cable for up to 3 x MS 30 (standard)

9pin Sub D-connector (male) to 3 MMCX-plugs (angled)

2m

CK.030.0003.3m

connecting cable for up to 3 x MS 30 (standard)

9pin Sub D-connector (male) to 3 MMCX-plugs (angled)

3m

-6

2pin inline plug to to 1 MMCX-plug

1m

-9

CK.030.1061

vacuum connecting cable (up to10 mbar) for 1 x MS 30 (open wires)

CK.030.1091

vacuum connecting cable (up to10 mbar) for 1 x MS 30 (open wires)

2pin inline plug to directly mounting to MS 30

1m

CK.030.USBU

RS 232 – USB Transformer (only applicable with CN 30)

9pin Sub D-connector (male) to USB A – plug

1m

CK.030.USB0

USB connecting cable

USB A – to USB B connectors

1.8 m

For vacuum connections please ask with detailed technical specifications.

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Micropositioners

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Index

Series CD

CD 85

Controller for Servo Motors

Technical Data No. of motors: Types of motors: Encoder: Types of profiles:

Specifications ¾ ¾ ¾ ¾

compact design, only 146 x 85 x 55 mm for up to 4 motors with 100 Watts power supply 24 Volts I/O card with 16 cannels optionally

Controller for Servo Motors Part no. CD.085.00

Application Examples

1

Motion control in ¾ Bio Technology ¾ Microscopy ¾ Quality Control ¾ Metrology ¾ R&D

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1 to 4 motors brushed or brushless servo incremental trapezoidal, s-curve, velocity profile, electronical gear, closed curves Contr. commands: user friendly and selfinstructional commands and parameters Electronical gear: master encoder selectable, slaveaxis selectable, factor “in motion” alterable Outline buffer: any outline with up to 65,000 points programmable Control parameter: PID-portion, acceleration/velocity parameter changeable during motion Monitoring functions: error limit and position error window selectable, comparator function, simultaneous tracing of different parameters during motion Inputs per axis: Encoder signals A, B, Index, Home, End+, EndFree inputs: 16 inputs, protected against misconnection, short-circuit proof Free outputs: 16 outputs Status/Errordisplay: 6 LED Interfaces: RS 232, CAN-Bus (standard CAN 2.0B) Supply voltage: 24 V

Servo-type

No. of axes

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2

Brushed servo

Brushless servo

1

2

3

4

1

2

3

4

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Micropositioners

Positionsensors

Motor Controllers

Customized Items

Index

Series CD

Dimensions:

mechOnics ag

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Micropositioners

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Customized Items

Index

Series CS

CS 85

Controller for Stepper Motors

Technical Data No. of motors: Types of motors: Encoder: Types of profiles:

Specifications ¾ ¾ ¾ ¾

compact design, only 146 x 85 x 55 mm for up to 4 motors with 100 Watts power supply 24 Volts I/O card with 16 cannels optionally

Controller for Stepper Motors Part no. CS.085.00

Application Examples

1

Motion control in ¾ Bio Technology ¾ Microscopy ¾ Quality Control ¾ Metrology ¾ R&D

mechOnics ag

Unnützstr. 2B

1 to 4 motors stepper or micro stepper motors incremental trapezoidal, s-curve, velocity profile, electronical gear, closed curves Contr. commands: user friendly and selfinstructional commands and parameters Electronical gear: master encoder selectable, slaveaxis selectable, factor “in motion” alterable Outline buffer: any outline with up to 65,000 points programmable Control parameter: PID-portion, acceleration/velocity parameter changeable during motion Monitoring functions: error limit and position error window selectable, comparator function, simultaneous tracing of different parameters during motion Inputs per axis: Encoder signals A, B, Index, Home, End+, EndFree inputs: 16 inputs, protected against misconnection, short-circuit proof Free outputs: 16 outputs Status/Errordisplay: 6 LED Interfaces: RS 232, CAN-Bus (standard CAN 2.0B) Supply voltage: 24 V

Type

No. of axes

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2

Stepper

Micro stepper

1

2

3

4

1

2

3

4

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Micropositioners

Positionsensors

Motor Controllers

Customized Items

Index

Series CS

Dimensions:

mechOnics ag

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Micropositioners

Position sensors

Motor Controllers

Customized Items

Index

Customized items of the mechOnics ag

Linear measuring stage MS 30 with linear measuring system and vacuum preparation MS 30 with - 8 mm travel - vacuum preparation for 10-6 mbar Linear measuring system PS 30 with - grating period 20 µm - measuring increments 0.1 µm - vacuum preparation for 10-6 mbar

Motorized aperture for REM Linear positioner for an aperture with - 7 mm travel in x – direction - 1 mm travel in y – direction - positioning accuracy better 1 µm - vacuum preparation for 10-6 mbar - nonmagnetic materials

XYZ – Positioner for ultra low temperature microscope -

3 mm travel in xyz About 250 nm step width Working temperature 4.2K vacuum preparation for 10-6 mbar Compact design

XYZ – Positioner MX 25 as Fiberpositioner XYZ – Positioner MX 25 with - 2 mm travel - About 200 nm step width - Velocity about 0.5 mm - On profile rail with optical height 40 mm

mechOnics ag

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