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Micropositioners

Positionsensors

Motor Controllers

Customized Items

Index

Table of contents of the delivery program Page 1. 1.1

Manual positioners with fine pitch screw Miniature Positioning Stage HS 30

2.

Linear positioning systems with piezo inertial drives

2.1

Linear positioners for one dimension (open design)

2

2.1.1 Miniature Positioning Stage MS 15 2.1.2 Miniature Positioning Stage MS 30 2.1.3 Miniature Positioning Stage MS 38 with free aperture 2.2

Linear positioners for one dimension (closed design)

2.2.1 Miniature Positioning Stage DS 30 2.2.2 Miniature Positioning Stage DS 40 2.2.3 Positioning Stage ML 17 for ultra low temperatures (4 K) 2.3

16 18

Linear positioners for the Nova-System

2.4.1 Miniature Positioning Stage NDS 40 (open loop operation) 2.4.2 Miniature Positioning Stage NDS 70 (closed loop operation)

mechOnics ag

10 12 14

Linear positioners for three dimensions

2.3.1 Miniature Positioners MX 25 and MX 35 2.3.2 Miniature Monomode Coupler MK 25 2.4

4 6 8

20 22

3.

Tilting systems with piezo inertial drives

3.1

Mirror tilting stage MT 25

4.

Position sensors for piezo inertial drives

4.1

Position Sensor PS 30 for Miniature Positioning Stage MS 30

5.

Motor Controllers

5.1 5.1.1 5.1.2 5.1.3 5.1.4

Controllers for piezo inertial drives Handheld controller CN 30 for piezo inertial drives USB – Controller CU 30 for piezo inertial drives USB – Controller CF 30 for piezo inertial drives USB – CAN – Controllers of the Nova Series

28 29 30 31

5.2

Connecting cables for linear positioning systems

35

5.3

Autonomous controller CD 85 for DC-Motors

36

5.4

Autonomous controller CS 85 for stepper motors

38

6.

Customized Items

6.1

Linear Positioning Stage MS 30 with linear measuring system and vacuum preparation

40

6.2

Motorized aperture for REM

40

6.3

XYZ – Positioner for ultra low temperature microscope (4 K)

40

6.4

Fiber Positioner with MX 25

40

Unnützstr. 2B

81825 Munich

24

Fon +49 (0) 89/4202 4207

Fax +49 (0) 89/4202 4206

26

www.mechOnics.de

Micropositioners

Positionsensors

Motor Controllers

Customized Items

Index

Series HS

HS 30

Miniature Translation Stages with fine pitch screws Technical Data

Specifications ¾ ¾ ¾ ¾ ¾ ¾ ¾ ¾ ¾ ¾

compatible with MS 30 series deformation-resistant aluminium, black anodized mountable on slides (OWIS and LINOS) setting sensitivity better than 1 µm self-locking compact design xy or xyz combinations precision ball bearing guides vacuum preparation optionally customized designs possible

Travel: Spindle pitch: Graduation of scale: Setting sensitivity: Mass:

8, 18 or 30 mm 0.25 mm 10 µm 2 µm 35, 41 or 50 g

Load characteristics Max. load capacity Mx, My, Mz Fx, Fy, Fz

1.5 Nm 50 N

Guidance accuracy (without load) For 8 mm travel: Yaw angle < 20 arc sec Pitch angle < 60 arc sec Vertical deviation < 1 µm Lateral deviation < 2 µm

Miniature Translation Stage HS 30

HS.030.0

Application Examples ¾ ¾ ¾ ¾ ¾ ¾

Micro-/Nano Technology Bio Technology Microscopy Quality Control Metrology R&D

mechOnics ag

Unnützstr. 2B

Part no.

Travel

Vacuum

81825 Munich

Fon +49 (0) 89/4202 4207

08

18

30

8 mm

18 mm

30 mm

0

6

9

no

10-6

10-9

Fax +49 (0)89/4202 4206

www.mechOnics.de

Micropositioners

Positionsensors

Motor Controllers

Customized Items

Index

Series HS HS 30, 8 mm travel

HS 30, 18 and 30 mm travel Travel

A

B

C

D

18

40

33.2

10.5

15.5

30

52

45.2

16.5

21.5

mechOnics ag

Unnützstr. 2B

81825 Munich

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Micropositioners

Positionsensors

Motor Controllers

Customized Items

Index

Series MS

MS 15

Ultra small Miniature Translation Stages with piezo electric inertial drive Technical Data Travel: Max. speed:

Specifications             

Piezo driven step motor with low hysteresis holds reached position without current step width about 15 nm (depends on controller) positioning accuracy better than 50 nm velocity up to 1.5 mm/s (depends on controller) travel 3.5 mm xy or xyz combinations CNC-machined aluminium body precision ball bearing guides no limit switches necessary vacuum preparation optionally customized designs possible driven by hand-held (CN.030.0001) or USB controller (CU.030.xx0x) or USB controller (CF.030.xx0x) connection cable CK.030.1003 recommended



Mass:

3.5 mm 1.5 mm/s (depends on controller) 6g

Load characteristics Max. load Mx, My, Mz Fx (blocking force) F y, F z

0.4 Nm 3 (4) N 20 N

Resolution (calculated) Single step ~ 450 nm 1/16-step ~ 30 nm (with controller CU 30) 1/64-step ~ 10 nm (with controller CF 30) Half step Double step (with controller CN 30)

~ 250 nm ~ 900 nm

Guidance accuracy (without load) Yaw angle < 20 arc sec Pitch angle < 60 arc sec Vertical deviation < 1 µm Lateral deviation < 2 µm

Miniature Translation Stage MS 15

Part no.

MS.015.04

Application Examples      

Vacuum

Micro-/Nano Technology Bio Technology Microscopy Quality Control Metrology R&D

mechOnics ag

Unnützstr. 2B

Mounting

81825 Munich

Fon +49 (0) 89/4202 4207

0

6

no

10

0

2

x

-6

xy (not removable)

Fax +49 (0)89/4202 4206

9 10-9

3 xyz

www.mechOnics.de

Micropositioners

Positionsensors

Motor Controllers

Customized Items

Index

Series MS

1,5

7,0

15,0

7,5

1,5

13,5

8 x M1

7,5

1,5

13,5

8 x M1

15,0

MS 15, 3.5 mm travel

1,5

7,5

7,5

13,5

13,5

15,0

Dimensions for xy – combination (not removable)

Dimensions for xyz – combination (xy – combination not removable)

mechOnics ag

Unnützstr. 2B

81825 Munich

Fon +49 (0) 89/4202 4207

Fax +49 (0)89/4202 4206

www.mechOnics.de

Micropositioners

Positionsensors

Motor Controllers

Customized Items

Index

Series MS

MS 30

Miniature Translation Stages with piezo electric inertial drive Technical Data Travel: Max. speed:

Specifications              

Piezo driven step motor with low hysteresis holds reached position without current step width about 10 nm (depends on controller) positioning accuracy better than 50 nm velocity up to 1.2 mm/s (depends on controller) travels up to 60 mm possible open- or closed loop-application xy or xyz combinations CNC-machined aluminium body precision ball bearing guides no limit switches necessary vacuum preparation optionally customized designs possible driven by hand-held (CN.030.0001) or USB controller (CU.030.xx0x) or USB controller (CF.030.xx0x)

Mass:

8, 18 or 30 mm 1.2 mm/s (depends on controller) 32, 38 or 54 g

Load characteristics Max. load Mx, My, Mz Fx (blocking force) F y, F z

0.5 Nm 4.5 (5) N 30 N

Resolution (calculated) Single step ~ 450 nm 1/16-step ~ 30 nm (with controller CU 30) 1/64-step ~ 10 nm (with controller CF 30) Half step Double step (with controller CN 30)

~ 250 nm ~ 900 nm

Guidance accuracy (without load) For 8 mm travel: Yaw angle < 20 arc sec Pitch angle < 60 arc sec Vertical deviation < 1 µm Lateral deviation < 2 µm

Miniature Translation Stage MS 30

Part no.

MS.030.

Application Examples      

Travel

Micro-/Nano Technology Bio Technology Microscopy Quality Control Metrology R&D

mechOnics ag

Unnützstr. 2B

Vacuum

08

18

30

8 mm

18 mm

30 mm

0

6

9

no

10-6

10-9

0

1

Measuring- without system

81825 Munich

Fon +49 (0) 89/4202 4207

with (please specify with sensor)

Fax +49 (0)89/4202 4206

www.mechOnics.de

Micropositioners

Positionsensors

Motor Controllers

Customized Items

Index

Series MS

B

4

15.0

H7

2 x Ø 1.5 - 3

2 x M2.5 - 3

MS 30, 8 mm travel

View X / Ansicht X

12

12.5

X 10

Snkg./cntrb. f. M2.5

M2.5 - 7

10

5.75

12.5

D H7

1.75

3

2 x Ø 1.5 - 3

C

H7

H7

2 x Ø 1.5 - 3

7.5

2 x Ø 1.5 - 5

10

30

10

10

MMCXBuchse/ Socket

20

15

Snkg./cntrb. f. M2.5

5,75

2

6

1.4

A

10

2 x M2.5 - 3 / 2 x Ø 5

20

4 x M3 - 3

B

C

D

18

40

33

10

15

30

52

45

16

21

B

10 6

1.4 Snkg./cntrb. f. M2.5

5,75 M2.5 - 7

10

12.5

5.75

3

1.75

D H7

2 x Ø 1.5 - 3

C

H7

10 H7

2 x Ø 1.5 - 3

7.5

2 x Ø 1.5 - 5

20

MMCXBuchse/ Socket

30

10

10

15

Snkg./cntrb. f. M2.5

View X / Ansicht X

X

12.5

12

15.0

2

4

H7

A

2 x M2.5 - 3

Travel

2 x Ø 1.5 - 3

MS 30, 18 and 30 mm travel

A

mechOnics ag

Unnützstr. 2B

81825 Munich

Fon +49 (0) 89/4202 4207

10

2 x M2.5 - 3 / 2 x Ø 5

20

4 x M3 - 3

Fax +49 (0)89/4202 4206

www.mechOnics.de

Micropositioners

Positionsensors

Motor Controllers

Customized Items

Index

Series MS

MS 38

Miniature Translation Stages with free opening dia 10 mm and piezo electric inertial drive Technical Data Travel: Free opening Max. speed:

Specifications ¾ ¾ ¾ ¾ ¾ ¾ ¾ ¾ ¾ ¾ ¾ ¾ ¾ ¾ ¾

Piezo driven step motor with low hysteresis holds reached position without current step width about 10 nm (depends on controller) positioning accuracy better than 50 nm velocity up to 1.2 mm/s (depends on controller) travel up to 8 mm free opening of 10 mm (on whole travel) fits to optical bench systems (LINOS, OWIS aso.) xy or xyz combinations CNC-machined aluminium body precision ball bearing guides no limit switches necessary vacuum preparation optionally customized designs possible driven by hand-held (CN.030.0001) or USB controller (CU.030.xx0x) or USB controller (CF.030.xx0x)

Mass:

8 mm 10 mm 1.5 mm/s (depends on controller) 32 g

Load characteristics Max. load Mx, My, Mz Fx (blocking force) Fy, Fz

0.4 Nm 4.5 (5) N 20 N

Resolution (calculated) Single step ~ 450 nm 1/16-step ~ 30 nm (with controller CU 30) 1/64-step ~ 10 nm (with controller CF 30) Half step Double step (with controller CN 30)

~ 250 nm ~ 900 nm

Guidance accuracy (without load) Yaw angle < 20 arc sec Pitch angle < 60 arc sec Vertical deviation < 1 µm Lateral deviation < 2 µm

Miniature Translation Stage MS 38

Part no. MS.038.080

Application Examples ¾ ¾ ¾ ¾ ¾ ¾

Vacuum

0

6

9

no

10-6

10-9

Micro-/Nano Technology Bio Technology Microscopy Quality Control Metrology R&D

mechOnics ag

Unnützstr. 2B

81825 Munich

Fon +49 (0) 89/4202 4207

Fax +49 (0)89/4202 4206

www.mechOnics.de

Micropositioners

Positionsensors

Motor Controllers

Customized Items

Index

Series MS

MS 38, 8 mm travel 20

View X / Ansicht X

2 x M2.5

3

ø

,0 12

7

M3

MMCXBuchse/ Socket

2 x M2.5, 1 x M3

6

9 14 19 24 29

14 9

10 mm

4 x M2.5

X

38 31 29 24

9 10

24

2 x M1.0

15

10.0 Snkg./cntrb. f. M2.5

1.4

9.5

6

6

2,9

40

Snkg./cntrb. f. M1

8 10

2 x M3 30

Snkg./cntrb. f. M1

2 x M3

32

xy and xyz combinations

mechOnics ag

Unnützstr. 2B

81825 Munich

Fon +49 (0) 89/4202 4207

Fax +49 (0)89/4202 4206

www.mechOnics.de

Micropositioners

Positionsensors

Motor Controllers

Customized Items

Index

Series DS

DS 30

Miniature Translation Stages with piezo electric inertial drive Technical Data Travel: Max. speed:

Specifications             

Piezo driven step motor with low hysteresis holds reached position without current step width about 20 nm (depends on controller) positioning accuracy better than 50 nm velocity up to 1.2 mm/s (depends on controller) only open-loop application xy combinations CNC-machined aluminium body precision ball bearing guides no limit switches necessary vacuum preparation optionally customized designs possible driven by hand-held (CN.030.0001) or USB controller (CU.030.xx0x) or USB controller (CF.030.xx0x)

Mass: Electrical connector:

8 mm 1.2 mm/s (depends on controller) 32 g 2pin MMCX-plug

Load characteristics Max. load Mx, My, Mz Fx (blocking force) Fy , Fz

0.5 Nm 4.5 (5) N 30 N

Resolution (calculated) Single step ~ 450 nm 1/16-step ~ 30 nm (with controller CU 30) 1/64-step ~ 10 nm (with controller CF 30) Half step Double step (with controller CN 30)

~ 250 nm ~ 900 nm

Guidance accuracy (without load) Yaw angle < 20 arc sec Pitch angle < 60 arc sec Vertical deviation < 1 µm Lateral deviation < 2 µm

Miniature Translation Stage DS 30

Part no. DS.030.

0

Application Examples      

08 Micro-/Nano Technology Bio Technology Microscopy Quality Control Metrology R&D

mechOnics ag

Unnützstr. 2B

Travel

8 mm

Vacuum

81825 Munich

Fon +49 (0) 89/4202 4207

0

6

no

10

-6

Fax +49 (0)89/4202 4206

9 10

-9

www.mechOnics.de

Micropositioners

Positionsensors

Motor Controllers

Customized Items

Index

Series DS DS 30, 8 mm travel

Front view:

Top view:

Rear view:

mechOnics ag

Unnützstr. 2B

81825 Munich

Fon +49 (0) 89/4202 4207

Fax +49 (0)89/4202 4206

www.mechOnics.de

Micropositioners

Positionsensors

Motor Controllers

Customized Items

Index

Series DS

DS 40

Miniature Translation Stages with piezo electric inertial drive Technical Data Travel: Max. speed:

Specifications             

Piezo driven step motor with low hysteresis holds reached position without current step width about 20 nm (depends on controller) positioning accuracy better than 50 nm velocity up to 1.2 mm/s (depends on controller) only open-loop application xy combinations CNC-machined aluminium body precision ball bearing guides no limit switches necessary vacuum preparation optionally customized designs possible driven by hand-held (CN.030.0001) or USB controller (CU.030.xx0x) or USB controller (CF.030.xx0x)

Mass: Electrical connector:

11 mm 1.2 mm/s (depends on controller) 50 g 2pin MMCX-plug

Load characteristics Max. load Mx, My, Mz Fx (blocking force) Fy , Fz

0.5 Nm 4.5 (5) N 30 N

Resolution (calculated) Single step ~ 450 nm 1/16-step ~ 30 nm (with controller CU 30) 1/64-step ~ 10 nm (with controller CF 30) Half step Double step (with controller CN 30)

~ 250 nm ~ 900 nm

Guidance accuracy (without load) Yaw angle < 20 arc sec Pitch angle < 60 arc sec Vertical deviation < 1 µm Lateral deviation < 2 µm

Miniature Translation Stage DS 40

Part no. DS.040.

0

11

Application Examples      

Travel

Micro-/Nano Technology Bio Technology Microscopy Quality Control Metrology R&D

mechOnics ag

Unnützstr. 2B

11 mm

Vacuum

81825 Munich

Fon +49 (0) 89/4202 4207

0

6

no

10

-6

Fax +49 (0)89/4202 4206

9 10

-9

www.mechOnics.de

Micropositioners

Positionsensors

Motor Controllers

Customized Items

Index

Series DS DS 40, 11 mm travel Front view:

Top view:

Rear view:

mechOnics ag

Unnützstr. 2B

81825 Munich

Fon +49 (0) 89/4202 4207

Fax +49 (0)89/4202 4206

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Micropositioners

Positionsensors

Motor Controllers

Customized Items

Index

Series ML

ML 17

Miniature Translation Stages for Ultra Low Temperatures with piezo electric inertial drive Technical Data Travel: Max. speed:

Specifications Piezo driven step motor with low hysteresis holds reached position without current for use at ultra low temperatures up to 4 K step width about 200 nm positioning accuracy better than 1 µm velocity up to 1.0 mm/s travels up to 5 mm xy or xyz combinations possible (L-bracket ML.017.9001 for xyz needed) CNC-machined steel body precision linear bearings no limit switches necessary vacuum preparation optionally customized designs possible driven by USB controller (CU.017.0003)

¾ ¾ ¾ ¾ ¾ ¾ ¾ ¾ ¾ ¾ ¾ ¾ ¾ ¾

Load characteristics Max. load Mx My, Mz Fx (blocking force) Fy, Fz

3.0 Ncm 1.5 Ncm 1.0 (1.5) N 1.0 N

Resolution (calculated) Single step with 22 V (at 4.2 K) ~ 200 nm with 42 V (at 4.2 K) ~ 500 nm with 82 V (at 4.2 K) ~ 1 µm (with controller CU 17 LT) Guidance accuracy (without load) For 5 mm travel: Vertical deviation < 2 µm Lateral deviation < 2 µm

Low Temperature Stage ML 17

Application Examples ¾ ¾ ¾ ¾ ¾ ¾ ¾

Electrical connection: Mass:

5 mm 1.0 mm/s (with controller CU 17 LT) 2 solder points 25 g

ML.017.0

Cryo - applications Micro-/Nano Technology Bio Technology Microscopy Quality Control Metrology R&D

Travel

Vacuum

mechOnics ag

Unnützstr. 2B

Part no.

81825 Munich

Fon +49 (0) 89/4202 4207

05

xx

5 mm

customized

6

9

10-6

10-9

Fax +49 (0)89/4202 4206

www.mechOnics.de

Micropositioners

Positionsensors

Motor Controllers

Customized Items

Index

Series ML Dimensions of the ML 17 32 31 24 16 9 1

15

8

17 16 1

10 x M1 - 1.5

4 x M1 - 1.5

6 21 27

xyz – combination of ML 17

mechOnics ag

Unnützstr. 2B

81825 Munich

Fon +49 (0) 89/4202 4207

Fax +49 (0)89/4202 4206

www.mechOnics.de

Micropositioners

Positionsensors

Motor Controllers

Customized Items

Index

Series MX

MX 25/35

Miniature XYZ Positioners with piezo electric inertial drive Technical Data Travel: MX 25 MX 35 Max. speed:

MX 25 with 2 mm travel in xyz-direction

Specifications           

Piezo driven step motor with low hysteresis holds position without power up to 10 mm travel in xyz step width about 10 nm (depends on controller) positioning accuracy better than 50 nm velocity up to 1.2 mm/s (depends on controller) CNC-machined aluminium body no limit switches necessary vacuum preparation optionally customized designs possible driven by hand-held (CN.030.0001) or USB controller (CU.030.0003) or USB controller (CF.030.xx0x)

2 mm in xyz 10 mm in xyz 1.2 mm/s (depends on the controller)

Mass: MX 25 MX 35

46 g 76 g

Load characteristics Type of load Mx, My, Mz Fx, Fy (jamming force) Fz (jamming force)

0.15 Nm