Fax +49 (0) 89/4202 4206 www. ... 2.1.3 Miniature Positioning Stage MS 38 with free aperture. 8. 2.2 Linear ...... and s
Micropositioners
Positionsensors
Motor Controllers
Customized Items
Index
Table of contents of the delivery program Page 1. 1.1
Manual positioners with fine pitch screw Miniature Positioning Stage HS 30
2.
Linear positioning systems with piezo inertial drives
2.1
Linear positioners for one dimension (open design)
2
2.1.1 Miniature Positioning Stage MS 15 2.1.2 Miniature Positioning Stage MS 30 2.1.3 Miniature Positioning Stage MS 38 with free aperture 2.2
Linear positioners for one dimension (closed design)
2.2.1 Miniature Positioning Stage DS 30 2.2.2 Miniature Positioning Stage DS 40 2.2.3 Positioning Stage ML 17 for ultra low temperatures (4 K) 2.3
16 18
Linear positioners for the Nova-System
2.4.1 Miniature Positioning Stage NDS 40 (open loop operation) 2.4.2 Miniature Positioning Stage NDS 70 (closed loop operation)
mechOnics ag
10 12 14
Linear positioners for three dimensions
2.3.1 Miniature Positioners MX 25 and MX 35 2.3.2 Miniature Monomode Coupler MK 25 2.4
4 6 8
20 22
3.
Tilting systems with piezo inertial drives
3.1
Mirror tilting stage MT 25
4.
Position sensors for piezo inertial drives
4.1
Position Sensor PS 30 for Miniature Positioning Stage MS 30
5.
Motor Controllers
5.1 5.1.1 5.1.2 5.1.3 5.1.4
Controllers for piezo inertial drives Handheld controller CN 30 for piezo inertial drives USB – Controller CU 30 for piezo inertial drives USB – Controller CF 30 for piezo inertial drives USB – CAN – Controllers of the Nova Series
28 29 30 31
5.2
Connecting cables for linear positioning systems
35
5.3
Autonomous controller CD 85 for DC-Motors
36
5.4
Autonomous controller CS 85 for stepper motors
38
6.
Customized Items
6.1
Linear Positioning Stage MS 30 with linear measuring system and vacuum preparation
40
6.2
Motorized aperture for REM
40
6.3
XYZ – Positioner for ultra low temperature microscope (4 K)
40
6.4
Fiber Positioner with MX 25
40
Unnützstr. 2B
81825 Munich
24
Fon +49 (0) 89/4202 4207
Fax +49 (0) 89/4202 4206
26
www.mechOnics.de
Micropositioners
Positionsensors
Motor Controllers
Customized Items
Index
Series HS
HS 30
Miniature Translation Stages with fine pitch screws Technical Data
Specifications ¾ ¾ ¾ ¾ ¾ ¾ ¾ ¾ ¾ ¾
compatible with MS 30 series deformation-resistant aluminium, black anodized mountable on slides (OWIS and LINOS) setting sensitivity better than 1 µm self-locking compact design xy or xyz combinations precision ball bearing guides vacuum preparation optionally customized designs possible
Travel: Spindle pitch: Graduation of scale: Setting sensitivity: Mass:
8, 18 or 30 mm 0.25 mm 10 µm 2 µm 35, 41 or 50 g
Load characteristics Max. load capacity Mx, My, Mz Fx, Fy, Fz
1.5 Nm 50 N
Guidance accuracy (without load) For 8 mm travel: Yaw angle < 20 arc sec Pitch angle < 60 arc sec Vertical deviation < 1 µm Lateral deviation < 2 µm
Miniature Translation Stage HS 30
HS.030.0
Application Examples ¾ ¾ ¾ ¾ ¾ ¾
Micro-/Nano Technology Bio Technology Microscopy Quality Control Metrology R&D
mechOnics ag
Unnützstr. 2B
Part no.
Travel
Vacuum
81825 Munich
Fon +49 (0) 89/4202 4207
08
18
30
8 mm
18 mm
30 mm
0
6
9
no
10-6
10-9
Fax +49 (0)89/4202 4206
www.mechOnics.de
Micropositioners
Positionsensors
Motor Controllers
Customized Items
Index
Series HS HS 30, 8 mm travel
HS 30, 18 and 30 mm travel Travel
A
B
C
D
18
40
33.2
10.5
15.5
30
52
45.2
16.5
21.5
mechOnics ag
Unnützstr. 2B
81825 Munich
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Fax +49 (0)89/4202 4206
www.mechOnics.de
Micropositioners
Positionsensors
Motor Controllers
Customized Items
Index
Series MS
MS 15
Ultra small Miniature Translation Stages with piezo electric inertial drive Technical Data Travel: Max. speed:
Specifications
Piezo driven step motor with low hysteresis holds reached position without current step width about 15 nm (depends on controller) positioning accuracy better than 50 nm velocity up to 1.5 mm/s (depends on controller) travel 3.5 mm xy or xyz combinations CNC-machined aluminium body precision ball bearing guides no limit switches necessary vacuum preparation optionally customized designs possible driven by hand-held (CN.030.0001) or USB controller (CU.030.xx0x) or USB controller (CF.030.xx0x) connection cable CK.030.1003 recommended
Mass:
3.5 mm 1.5 mm/s (depends on controller) 6g
Load characteristics Max. load Mx, My, Mz Fx (blocking force) F y, F z
0.4 Nm 3 (4) N 20 N
Resolution (calculated) Single step ~ 450 nm 1/16-step ~ 30 nm (with controller CU 30) 1/64-step ~ 10 nm (with controller CF 30) Half step Double step (with controller CN 30)
~ 250 nm ~ 900 nm
Guidance accuracy (without load) Yaw angle < 20 arc sec Pitch angle < 60 arc sec Vertical deviation < 1 µm Lateral deviation < 2 µm
Miniature Translation Stage MS 15
Part no.
MS.015.04
Application Examples
Vacuum
Micro-/Nano Technology Bio Technology Microscopy Quality Control Metrology R&D
mechOnics ag
Unnützstr. 2B
Mounting
81825 Munich
Fon +49 (0) 89/4202 4207
0
6
no
10
0
2
x
-6
xy (not removable)
Fax +49 (0)89/4202 4206
9 10-9
3 xyz
www.mechOnics.de
Micropositioners
Positionsensors
Motor Controllers
Customized Items
Index
Series MS
1,5
7,0
15,0
7,5
1,5
13,5
8 x M1
7,5
1,5
13,5
8 x M1
15,0
MS 15, 3.5 mm travel
1,5
7,5
7,5
13,5
13,5
15,0
Dimensions for xy – combination (not removable)
Dimensions for xyz – combination (xy – combination not removable)
mechOnics ag
Unnützstr. 2B
81825 Munich
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Fax +49 (0)89/4202 4206
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Micropositioners
Positionsensors
Motor Controllers
Customized Items
Index
Series MS
MS 30
Miniature Translation Stages with piezo electric inertial drive Technical Data Travel: Max. speed:
Specifications
Piezo driven step motor with low hysteresis holds reached position without current step width about 10 nm (depends on controller) positioning accuracy better than 50 nm velocity up to 1.2 mm/s (depends on controller) travels up to 60 mm possible open- or closed loop-application xy or xyz combinations CNC-machined aluminium body precision ball bearing guides no limit switches necessary vacuum preparation optionally customized designs possible driven by hand-held (CN.030.0001) or USB controller (CU.030.xx0x) or USB controller (CF.030.xx0x)
Mass:
8, 18 or 30 mm 1.2 mm/s (depends on controller) 32, 38 or 54 g
Load characteristics Max. load Mx, My, Mz Fx (blocking force) F y, F z
0.5 Nm 4.5 (5) N 30 N
Resolution (calculated) Single step ~ 450 nm 1/16-step ~ 30 nm (with controller CU 30) 1/64-step ~ 10 nm (with controller CF 30) Half step Double step (with controller CN 30)
~ 250 nm ~ 900 nm
Guidance accuracy (without load) For 8 mm travel: Yaw angle < 20 arc sec Pitch angle < 60 arc sec Vertical deviation < 1 µm Lateral deviation < 2 µm
Miniature Translation Stage MS 30
Part no.
MS.030.
Application Examples
Travel
Micro-/Nano Technology Bio Technology Microscopy Quality Control Metrology R&D
mechOnics ag
Unnützstr. 2B
Vacuum
08
18
30
8 mm
18 mm
30 mm
0
6
9
no
10-6
10-9
0
1
Measuring- without system
81825 Munich
Fon +49 (0) 89/4202 4207
with (please specify with sensor)
Fax +49 (0)89/4202 4206
www.mechOnics.de
Micropositioners
Positionsensors
Motor Controllers
Customized Items
Index
Series MS
B
4
15.0
H7
2 x Ø 1.5 - 3
2 x M2.5 - 3
MS 30, 8 mm travel
View X / Ansicht X
12
12.5
X 10
Snkg./cntrb. f. M2.5
M2.5 - 7
10
5.75
12.5
D H7
1.75
3
2 x Ø 1.5 - 3
C
H7
H7
2 x Ø 1.5 - 3
7.5
2 x Ø 1.5 - 5
10
30
10
10
MMCXBuchse/ Socket
20
15
Snkg./cntrb. f. M2.5
5,75
2
6
1.4
A
10
2 x M2.5 - 3 / 2 x Ø 5
20
4 x M3 - 3
B
C
D
18
40
33
10
15
30
52
45
16
21
B
10 6
1.4 Snkg./cntrb. f. M2.5
5,75 M2.5 - 7
10
12.5
5.75
3
1.75
D H7
2 x Ø 1.5 - 3
C
H7
10 H7
2 x Ø 1.5 - 3
7.5
2 x Ø 1.5 - 5
20
MMCXBuchse/ Socket
30
10
10
15
Snkg./cntrb. f. M2.5
View X / Ansicht X
X
12.5
12
15.0
2
4
H7
A
2 x M2.5 - 3
Travel
2 x Ø 1.5 - 3
MS 30, 18 and 30 mm travel
A
mechOnics ag
Unnützstr. 2B
81825 Munich
Fon +49 (0) 89/4202 4207
10
2 x M2.5 - 3 / 2 x Ø 5
20
4 x M3 - 3
Fax +49 (0)89/4202 4206
www.mechOnics.de
Micropositioners
Positionsensors
Motor Controllers
Customized Items
Index
Series MS
MS 38
Miniature Translation Stages with free opening dia 10 mm and piezo electric inertial drive Technical Data Travel: Free opening Max. speed:
Specifications ¾ ¾ ¾ ¾ ¾ ¾ ¾ ¾ ¾ ¾ ¾ ¾ ¾ ¾ ¾
Piezo driven step motor with low hysteresis holds reached position without current step width about 10 nm (depends on controller) positioning accuracy better than 50 nm velocity up to 1.2 mm/s (depends on controller) travel up to 8 mm free opening of 10 mm (on whole travel) fits to optical bench systems (LINOS, OWIS aso.) xy or xyz combinations CNC-machined aluminium body precision ball bearing guides no limit switches necessary vacuum preparation optionally customized designs possible driven by hand-held (CN.030.0001) or USB controller (CU.030.xx0x) or USB controller (CF.030.xx0x)
Mass:
8 mm 10 mm 1.5 mm/s (depends on controller) 32 g
Load characteristics Max. load Mx, My, Mz Fx (blocking force) Fy, Fz
0.4 Nm 4.5 (5) N 20 N
Resolution (calculated) Single step ~ 450 nm 1/16-step ~ 30 nm (with controller CU 30) 1/64-step ~ 10 nm (with controller CF 30) Half step Double step (with controller CN 30)
~ 250 nm ~ 900 nm
Guidance accuracy (without load) Yaw angle < 20 arc sec Pitch angle < 60 arc sec Vertical deviation < 1 µm Lateral deviation < 2 µm
Miniature Translation Stage MS 38
Part no. MS.038.080
Application Examples ¾ ¾ ¾ ¾ ¾ ¾
Vacuum
0
6
9
no
10-6
10-9
Micro-/Nano Technology Bio Technology Microscopy Quality Control Metrology R&D
mechOnics ag
Unnützstr. 2B
81825 Munich
Fon +49 (0) 89/4202 4207
Fax +49 (0)89/4202 4206
www.mechOnics.de
Micropositioners
Positionsensors
Motor Controllers
Customized Items
Index
Series MS
MS 38, 8 mm travel 20
View X / Ansicht X
2 x M2.5
3
ø
,0 12
7
M3
MMCXBuchse/ Socket
2 x M2.5, 1 x M3
6
9 14 19 24 29
14 9
10 mm
4 x M2.5
X
38 31 29 24
9 10
24
2 x M1.0
15
10.0 Snkg./cntrb. f. M2.5
1.4
9.5
6
6
2,9
40
Snkg./cntrb. f. M1
8 10
2 x M3 30
Snkg./cntrb. f. M1
2 x M3
32
xy and xyz combinations
mechOnics ag
Unnützstr. 2B
81825 Munich
Fon +49 (0) 89/4202 4207
Fax +49 (0)89/4202 4206
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Micropositioners
Positionsensors
Motor Controllers
Customized Items
Index
Series DS
DS 30
Miniature Translation Stages with piezo electric inertial drive Technical Data Travel: Max. speed:
Specifications
Piezo driven step motor with low hysteresis holds reached position without current step width about 20 nm (depends on controller) positioning accuracy better than 50 nm velocity up to 1.2 mm/s (depends on controller) only open-loop application xy combinations CNC-machined aluminium body precision ball bearing guides no limit switches necessary vacuum preparation optionally customized designs possible driven by hand-held (CN.030.0001) or USB controller (CU.030.xx0x) or USB controller (CF.030.xx0x)
Mass: Electrical connector:
8 mm 1.2 mm/s (depends on controller) 32 g 2pin MMCX-plug
Load characteristics Max. load Mx, My, Mz Fx (blocking force) Fy , Fz
0.5 Nm 4.5 (5) N 30 N
Resolution (calculated) Single step ~ 450 nm 1/16-step ~ 30 nm (with controller CU 30) 1/64-step ~ 10 nm (with controller CF 30) Half step Double step (with controller CN 30)
~ 250 nm ~ 900 nm
Guidance accuracy (without load) Yaw angle < 20 arc sec Pitch angle < 60 arc sec Vertical deviation < 1 µm Lateral deviation < 2 µm
Miniature Translation Stage DS 30
Part no. DS.030.
0
Application Examples
08 Micro-/Nano Technology Bio Technology Microscopy Quality Control Metrology R&D
mechOnics ag
Unnützstr. 2B
Travel
8 mm
Vacuum
81825 Munich
Fon +49 (0) 89/4202 4207
0
6
no
10
-6
Fax +49 (0)89/4202 4206
9 10
-9
www.mechOnics.de
Micropositioners
Positionsensors
Motor Controllers
Customized Items
Index
Series DS DS 30, 8 mm travel
Front view:
Top view:
Rear view:
mechOnics ag
Unnützstr. 2B
81825 Munich
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Micropositioners
Positionsensors
Motor Controllers
Customized Items
Index
Series DS
DS 40
Miniature Translation Stages with piezo electric inertial drive Technical Data Travel: Max. speed:
Specifications
Piezo driven step motor with low hysteresis holds reached position without current step width about 20 nm (depends on controller) positioning accuracy better than 50 nm velocity up to 1.2 mm/s (depends on controller) only open-loop application xy combinations CNC-machined aluminium body precision ball bearing guides no limit switches necessary vacuum preparation optionally customized designs possible driven by hand-held (CN.030.0001) or USB controller (CU.030.xx0x) or USB controller (CF.030.xx0x)
Mass: Electrical connector:
11 mm 1.2 mm/s (depends on controller) 50 g 2pin MMCX-plug
Load characteristics Max. load Mx, My, Mz Fx (blocking force) Fy , Fz
0.5 Nm 4.5 (5) N 30 N
Resolution (calculated) Single step ~ 450 nm 1/16-step ~ 30 nm (with controller CU 30) 1/64-step ~ 10 nm (with controller CF 30) Half step Double step (with controller CN 30)
~ 250 nm ~ 900 nm
Guidance accuracy (without load) Yaw angle < 20 arc sec Pitch angle < 60 arc sec Vertical deviation < 1 µm Lateral deviation < 2 µm
Miniature Translation Stage DS 40
Part no. DS.040.
0
11
Application Examples
Travel
Micro-/Nano Technology Bio Technology Microscopy Quality Control Metrology R&D
mechOnics ag
Unnützstr. 2B
11 mm
Vacuum
81825 Munich
Fon +49 (0) 89/4202 4207
0
6
no
10
-6
Fax +49 (0)89/4202 4206
9 10
-9
www.mechOnics.de
Micropositioners
Positionsensors
Motor Controllers
Customized Items
Index
Series DS DS 40, 11 mm travel Front view:
Top view:
Rear view:
mechOnics ag
Unnützstr. 2B
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Fax +49 (0)89/4202 4206
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Micropositioners
Positionsensors
Motor Controllers
Customized Items
Index
Series ML
ML 17
Miniature Translation Stages for Ultra Low Temperatures with piezo electric inertial drive Technical Data Travel: Max. speed:
Specifications Piezo driven step motor with low hysteresis holds reached position without current for use at ultra low temperatures up to 4 K step width about 200 nm positioning accuracy better than 1 µm velocity up to 1.0 mm/s travels up to 5 mm xy or xyz combinations possible (L-bracket ML.017.9001 for xyz needed) CNC-machined steel body precision linear bearings no limit switches necessary vacuum preparation optionally customized designs possible driven by USB controller (CU.017.0003)
¾ ¾ ¾ ¾ ¾ ¾ ¾ ¾ ¾ ¾ ¾ ¾ ¾ ¾
Load characteristics Max. load Mx My, Mz Fx (blocking force) Fy, Fz
3.0 Ncm 1.5 Ncm 1.0 (1.5) N 1.0 N
Resolution (calculated) Single step with 22 V (at 4.2 K) ~ 200 nm with 42 V (at 4.2 K) ~ 500 nm with 82 V (at 4.2 K) ~ 1 µm (with controller CU 17 LT) Guidance accuracy (without load) For 5 mm travel: Vertical deviation < 2 µm Lateral deviation < 2 µm
Low Temperature Stage ML 17
Application Examples ¾ ¾ ¾ ¾ ¾ ¾ ¾
Electrical connection: Mass:
5 mm 1.0 mm/s (with controller CU 17 LT) 2 solder points 25 g
ML.017.0
Cryo - applications Micro-/Nano Technology Bio Technology Microscopy Quality Control Metrology R&D
Travel
Vacuum
mechOnics ag
Unnützstr. 2B
Part no.
81825 Munich
Fon +49 (0) 89/4202 4207
05
xx
5 mm
customized
6
9
10-6
10-9
Fax +49 (0)89/4202 4206
www.mechOnics.de
Micropositioners
Positionsensors
Motor Controllers
Customized Items
Index
Series ML Dimensions of the ML 17 32 31 24 16 9 1
15
8
17 16 1
10 x M1 - 1.5
4 x M1 - 1.5
6 21 27
xyz – combination of ML 17
mechOnics ag
Unnützstr. 2B
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Micropositioners
Positionsensors
Motor Controllers
Customized Items
Index
Series MX
MX 25/35
Miniature XYZ Positioners with piezo electric inertial drive Technical Data Travel: MX 25 MX 35 Max. speed:
MX 25 with 2 mm travel in xyz-direction
Specifications
Piezo driven step motor with low hysteresis holds position without power up to 10 mm travel in xyz step width about 10 nm (depends on controller) positioning accuracy better than 50 nm velocity up to 1.2 mm/s (depends on controller) CNC-machined aluminium body no limit switches necessary vacuum preparation optionally customized designs possible driven by hand-held (CN.030.0001) or USB controller (CU.030.0003) or USB controller (CF.030.xx0x)
2 mm in xyz 10 mm in xyz 1.2 mm/s (depends on the controller)
Mass: MX 25 MX 35
46 g 76 g
Load characteristics Type of load Mx, My, Mz Fx, Fy (jamming force) Fz (jamming force)
0.15 Nm